Depth profiling of deuterium implanted in thin films by the elastic recoil detection technique of transmission geometry

✍ Scribed by S. Morimoto; S. Nagata; S. Yamaguchi; Y. Fujino

• Book ID: 113280615
• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 391 KB
• Volume: 48
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(90)90165-q