Quantitative compositional depth profiling of Si1−x−yGexCy thin films by simultaneous elastic recoil detection and Rutherford backscattering spectrometry

✍ Scribed by S.C. Gujrathi; S. Roorda; J.G. D'Arcy; Randall J. Pflueger; P. Desjardins; I. Petrov; J.E. Greene

• Book ID: 114169808
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 625 KB
• Volume: 136-138
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(97)00881-1