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Elemental depth profiling of a-Si1−xGex:H films by elastic recoil detection analysis and secondary ion mass spectrometry

✍ Scribed by A. Mikami; T. Takagawa; K. Nishio; H. Ogawa; T. Okazawa; Y. Kido


Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
417 KB
Volume
252
Category
Article
ISSN
0169-4332

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