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Simple fabrication scheme for sub-10 nm electrode gaps using electron-beam lithography

✍ Scribed by Liu, K.; Avouris, Ph.; Bucchignano, J.; Martel, R.; Sun, S.; Michl, J.

Book ID: 121499445
Publisher: American Institute of Physics
Year: 2002
Tongue: English
Weight: 497 KB
Volume: 80
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.1436275

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