✦ LIBER ✦
Thermal-flow techniques for sub-35 nm contact-hole fabrication using Taguchi method in electron-beam lithography
✍ Scribed by Te-Sheng Li; Szu-Hung Chen; Hsuen-Li Chen
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 532 KB
- Volume
- 86
- Category
- Article
- ISSN
- 0167-9317
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