✦ LIBER ✦
Electron-beam lithography for the magnetic recording industry: fabrication of nanoscale (10 nm) thin-film read heads
✍ Scribed by A.A.G. Driskill-Smith; J.A. Katine; D.P. Druist; K.Y. Lee; R.C. Tiberio; A. Chiu
- Book ID
- 113797632
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 283 KB
- Volume
- 73-74
- Category
- Article
- ISSN
- 0167-9317
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