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Silicon on insulator structures formed by the implantation of high doses of reactive ions

โœ Scribed by P.L.F. Hemment; R.F. Peart; M.F. Yao; K.G. Stephens; R.P. Arrowsmith; R.J. Chater; J.A. Kilner


Book ID
113277344
Publisher
Elsevier Science
Year
1985
Tongue
English
Weight
517 KB
Volume
6
Category
Article
ISSN
0168-583X

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