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Silicon growth at low temperatures: SiH4-HCl-H2 system

✍ Scribed by Hong H. Lee

Publisher: Elsevier Science
Year: 1984
Tongue: English
Weight: 587 KB
Volume: 69
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(84)90011-3

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