✦ LIBER ✦
Low-temperature epitaxial growth of undoped and n-doped silicon by photochemical vapor deposition using SiH4/SiH2Cl2/H2/PH3 mixtures
✍ Scribed by J.C. Alonso; T. Oshima; A. Yamada; M. Konagai; K. Takahashi
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 612 KB
- Volume
- 237
- Category
- Article
- ISSN
- 0040-6090
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