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Silicate formation and thermal stability of ternary rare earth oxides as high-k dielectrics

✍ Scribed by S. Van Elshocht; C. Adelmann; T. Conard; A. Delabie; A. Franquet; L. Nyns; O. Richard; P. Lehnen; J. Swerts; S. De Gendt


Book ID
121813015
Publisher
AVS (American Vacuum Society)
Year
2008
Tongue
English
Weight
659 KB
Volume
26
Category
Article
ISSN
0734-2101

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