Thermal stability and electrical properties of Zr silicate films for high-kgate-dielectric applications, as prepared by pulsed laser deposition

✍ Scribed by J. Zhu; Z.G. Liu; M. Zhu; G.L. Yuan; J.M. Liu

• Publisher: Springer
• Year: 2005
• Tongue: English
• Weight: 567 KB
• Volume: 80
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s00339-003-2187-4