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Sidewall quality in proton beam writing

✍ Scribed by S.Y. Chiam; J.A. van Kan; T. Osipowicz; C.N.B. Udalagama; F. Watt

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 569 KB
Volume: 260
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2007.02.012

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