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Proton beam writing

✍ Scribed by Frank Watt; Mark B.H. Breese; Andrew A. Bettiol; Jeroen A. van Kan

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 880 KB
Volume: 10
Category: Article
ISSN: 1369-7021
DOI: 10.1016/s1369-7021(07)70129-3

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