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New resists for proton beam writing

✍ Scribed by J.A. van Kan; A.A. Bettiol; S.Y. Chiam; M.S.M. Saifullah; K.R.V. Subramanian; M.E. Welland; F. Watt

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 823 KB
Volume: 260
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2007.02.063

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