Proton beam writing (PBW) is a powerful tool for prototyping microphotonic structures in a wide variety of materials including polymers, insulators, semiconductors and metals. Prototyping is achieved either through direct fabrication with the proton beam, or by the fabrication of a master that can b
New developments in the applications of proton beam writing
โ Scribed by P. Mistry; I. Gomez-Morilla; G.W. Grime; R.P. Webb; R. Gwilliam; A. Cansell; M. Merchant; K.J. Kirkby; E.J. Teo; M.B.H. Breese; A.A. Bettiol; D.J. Blackwood; F. Watt
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 252 KB
- Volume
- 237
- Category
- Article
- ISSN
- 0168-583X
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