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A progress review of proton beam writing applications in microphotonics

โœ Scribed by A.A. Bettiol; T.C. Sum; F.C. Cheong; C.H. Sow; S. Venugopal Rao; J.A. van Kan; E.J. Teo; K. Ansari; F. Watt

Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
488 KB
Volume
231
Category
Article
ISSN
0168-583X

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๐Ÿ“œ SIMILAR VOLUMES

Advanced applications in microphotonics
Advanced applications in microphotonics using proton beam writing
โœ A.A. Bettiol; S.Y. Chiam; E.J. Teo; C. Udalagama; S.F. Chan; S.K. Hoi; J.A. van ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 736 KB

Proton beam writing (PBW) is a powerful tool for prototyping microphotonic structures in a wide variety of materials including polymers, insulators, semiconductors and metals. Prototyping is achieved either through direct fabrication with the proton beam, or by the fabrication of a master that can b