๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Maskless proton beam writing in gallium arsenide

โœ Scribed by P. Mistry; I. Gomez-Morilla; R.C. Smith; D. Thomson; G.W. Grime; R.P. Webb; R. Gwilliam; C. Jeynes; A. Cansell; M. Merchant; K.J. Kirkby

Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
336 KB
Volume
260
Category
Article
ISSN
0168-583X

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

Sidewall quality in proton beam writing
Sidewall quality in proton beam writing
โœ S.Y. Chiam; J.A. van Kan; T. Osipowicz; C.N.B. Udalagama; F. Watt ๐Ÿ“‚ Article ๐Ÿ“… 2007 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 569 KB
Proton beam writing of microstructures i
Proton beam writing of microstructures in silicon
โœ M.B.H. Breese; E.J. Teo; D. Mangaiyarkarasi; F. Champeaux; A.A. Bettiol; D. Blac ๐Ÿ“‚ Article ๐Ÿ“… 2005 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 331 KB

The ability to directly pattern the surface of semiconductor wafers using very accurately controlled fluences of finely focused high-energy ion beams has opened up new research directions for the fabrication of a variety of high-aspect ratio, multi-level microstructures in silicon. A beam of hydroge

Advanced applications in microphotonics
Advanced applications in microphotonics using proton beam writing
โœ A.A. Bettiol; S.Y. Chiam; E.J. Teo; C. Udalagama; S.F. Chan; S.K. Hoi; J.A. van ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 736 KB

Proton beam writing (PBW) is a powerful tool for prototyping microphotonic structures in a wide variety of materials including polymers, insulators, semiconductors and metals. Prototyping is achieved either through direct fabrication with the proton beam, or by the fabrication of a master that can b