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Si1 − xGex metal-oxide-semiconductor capacitors with HfTaOx gate dielectrics

✍ Scribed by S. Mallik; C. Mahata; M.K. Hota; C.K. Sarkar; C.K. Maiti

Book ID: 113937113
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 849 KB
Volume: 520
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2011.06.057

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