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Si epitaxial growth on atomic-order nitrided Si(1 0 0) using electron cyclotron resonance plasma

✍ Scribed by Masaki Mori; Takuya Seino; Daisuke Muto; Masao Sakuraba; Junichi Murota

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 210 KB
Volume: 8
Category: Article
ISSN: 1369-8001
DOI: 10.1016/j.mssp.2004.09.034

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Si epitaxial growth on atomic-order nitrided Si(1&#xa0;0&#xa0;0) using electron cyclotron resonance plasma

Si epitaxial growth on atomic-order nitrided Si(1 0 0) using electron cyclotron resonance plasma