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SEM observation of dislocations in boron implanted silicon using schottky barrier EBIC technique

✍ Scribed by Ioannou, D. E. ;Davidson, S. M.

Publisher: John Wiley and Sons
Year: 1978
Tongue: English
Weight: 399 KB
Volume: 48
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2210480137

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