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Secondary ion species containing nitrogen atoms from plasma-enhanced chemical vapor deposited silicon oxide films on silicon

✍ Scribed by Kiyoshi Chiba; Yoshinori Tsuji

Book ID: 103819364
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 621 KB
Volume: 254
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2008.03.037

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