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Scanning Ion Probe Studies of Silicon Implantation Profiles in AlGaN/GaN HEMT Heterostructures

✍ Scribed by M. Kocan; G.A. Umana-Membreno; M.R. Kilburn; I.R. Fletcher; F. Recht; L. McCarthy; U.K. Mishra; B.D. Nener; G. Parish

Book ID: 107455070
Publisher: Springer US
Year: 2007
Tongue: English
Weight: 267 KB
Volume: 37
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-007-0336-9

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