Room temperature migration of ion beam injected point defects in crystalline silicon

✍ Scribed by Vittorio Privitera; Salvatore Coffa; Francesco Priolo; Kim Kyllesbech Larsen; Sebania Libertino; Alberto Carnera

• Book ID: 114168387
• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 529 KB
• Volume: 120
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(96)00472-7