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Room-temperature migration and interaction of ion beam generated defects in crystalline silicon

โœ Scribed by Privitera, Vittorio; Coffa, Salvatore; Priolo, Francesco; Larsen, Kim Kyllesbech; Mannino, Giovanni


Book ID
121807339
Publisher
American Institute of Physics
Year
1996
Tongue
English
Weight
295 KB
Volume
68
Category
Article
ISSN
0003-6951

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