New insight on the interaction and diffusion properties of ion beam injected self-interstitials in crystalline silicon

✍ Scribed by D. De Salvador; E. Napolitani; S. Mirabella; F. Giannazzo; V. Raineri; G. Bisognin; M. Berti; A. Carnera; A.V. Drigo; A. Terrasi; F. Priolo

• Book ID: 114167193
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 196 KB
• Volume: 206
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(03)00862-0