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Point defects observed in crystalline silicon implanted by MeV Si ions at elevated temperatures

✍ Scribed by J. Lalita; B.G. Svensson; C. Jagadish

Book ID: 113284913
Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 578 KB
Volume: 96
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(94)00484-6

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