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Point defects in MeV ion-implanted silicon studied by deep level transient spectroscopy

✍ Scribed by B.G. Svensson; C. Jagadish; A. Hallén; J. Lalita


Book ID
113286816
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
810 KB
Volume
106
Category
Article
ISSN
0168-583X

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