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Resonant Auger electron spectroscopy for analysis of the chemical state of phosphorus segregated at SiO2/Si interfaces

✍ Scribed by M. Oshima; Y. Yoshimura; K. Ono; H. Fujioka; Y. Sato; Y. Baba; K. Yoshii; T.A. Sasaki


Book ID
108437183
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
358 KB
Volume
88-91
Category
Article
ISSN
0368-2048

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