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A new application of electron energy loss spectroscopy technique for a non-destructive study of the Si-SiO2 interface

✍ Scribed by T. Ito; M. Iwami; A. Hiraki

Publisher: Elsevier Science
Year: 1980
Tongue: English
Weight: 514 KB
Volume: 36
Category: Article
ISSN: 0038-1098
DOI: 10.1016/0038-1098(80)90211-2

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