✦ LIBER ✦
Study by electron spectroscopy for chemical analysis of silicon, SiO2 and Si3N4 surfaces treated with various CF4-containing plasmas
✍ Scribed by A. Licciardello; S. Pignataro; M. Pànczèl
- Publisher
- Elsevier Science
- Year
- 1983
- Weight
- 531 KB
- Volume
- 18
- Category
- Article
- ISSN
- 0376-4583
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