Residual Strain Evaluation by Cross-Sectional Micro-Reflectance Spectroscopy of Freestanding GaN Grown by Hydride Vapor Phase Epitaxy

✍ Scribed by Geng, Huiyuan; Yamaguchi, A Atsushi; Sunakawa, Haruo; Sumi, Norihiko; Yamamoto, Kazutomi; Usui, Akira

• Book ID: 120046772
• Publisher: Institute of Pure and Applied Physics
• Year: 2011
• Tongue: English
• Weight: 346 KB
• Volume: 50
• Category: Article
• ISSN: 0021-4922
• DOI: 10.1143/JJAP.50.01AC01