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Remote plasma-enhanced chemical vapour deposition of silicon nitride at atmospheric pressure

✍ Scribed by Nowling, G R; Babayan, S E; Jankovic, V; Hicks, R F

Book ID: 121510104
Publisher: Institute of Physics
Year: 2002
Tongue: English
Weight: 202 KB
Volume: 11
Category: Article
ISSN: 0963-0252
DOI: 10.1088/0963-0252/11/1/312

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