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Heating effect in plasma-enhanced chemical vapour deposition of silicon nitride

✍ Scribed by I. K. Han; Y. J. Lee; J. H. Jo; J. I. Lee; K. N. Kang

Publisher: Springer
Year: 1991
Tongue: English
Weight: 232 KB
Volume: 10
Category: Article
ISSN: 0261-8028
DOI: 10.1007/bf00726926

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