✦ LIBER ✦

Reliability issues concerning thin gate SiO2 and SiO2/Si interface for ULSI applications

✍ Scribed by T.P. Ma

Book ID: 113283700
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 723 KB
Volume: 74
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(93)95064-c

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Theory and application of charge pumping

Theory and application of charge pumping for the characterization of Si-SiO2 interface and near-interface oxide traps

✍ Paulsen, R.E.; White, M.H. 📂 Article 📅 1994 🏛 IEEE 🌐 English ⚖ 453 KB

Controlled nitrogen incorporation at Si

Controlled nitrogen incorporation at SiSiO2 interfaces and in thin gate dielectrics by remote-plasma-assisted oxidation and deposition processes

✍ D.R. Lee; S.V. Hattangady; H. Niimi; C. Parker; G. Lucovsky; J.R. Hauser 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 366 KB

Work function of Ni3Si2 on HfSixOy and S

Work function of Ni3Si2 on HfSixOy and SiO2 and its implication for Ni fully silicided gate applications

✍ Kittl, J. A.; OSullivan, B. J.; Kaushik, V. S.; Lauwers, A.; Pawlak, M. A.; Hoff 📂 Article 📅 2007 🏛 American Institute of Physics 🌐 English ⚖ 332 KB

Improving the reliability and the insula

Improving the reliability and the insulation properties of gate oxide in the gate injection mode by using a new procedure of (100) Si surface and Si/SiO2 interface treatments

✍ Ohkawa, T.; Nakamura, O.; Sugawa, S.; Aharoni, H.; Ohmi, T. 📂 Article 📅 2001 🏛 IEEE 🌐 English ⚖ 85 KB

Characterization and reliability of dual

Characterization and reliability of dual high-k gate dielectric stack (poly-Si-HfO2-SiO2) prepared by in situ RTCVD process for system-on-chip applications

✍ Lee, S.J.; Choi, C.H.; Kamath, A.; Clark, R.; Kwong, D.L. 📂 Article 📅 2003 🏛 IEEE 🌐 English ⚖ 300 KB

Development of ultra-thin tunneling oxid

Development of ultra-thin tunneling oxides and Si/SiO2 nanostructures for the application in silicon solar cells

✍ Malguth, Enno ;Roczen, Maurizio ;Gref, Orman ;Schoepke, Andreas ;Schmidt, Manfre 📂 Article 📅 2010 🏛 John Wiley and Sons 🌐 English ⚖ 232 KB