𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Reliability in Modeling of Spectroscopic Ellipsometry

✍ Scribed by Lin, S.H. ;Chan, Y.C. ;Webb, D.P. ;Lam, Y.W.


Publisher
John Wiley and Sons
Year
2000
Tongue
English
Weight
130 KB
Volume
182
Category
Article
ISSN
0031-8965

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES


Modelling of multilayer films using spec
✍ K. Chattopadhyay; J. Aubel; S. Sundaram πŸ“‚ Article πŸ“… 1995 πŸ› Springer 🌐 English βš– 428 KB

A systematic investigation of the ellipsometric parameters of MBE-grown heterostructures of InxGal \_xAs on GaAs substrate has been completed. The index of refraction n, and extinction coefficient, k, values of the above heterostructure in the wavelength range 500-800 nm, are presented, a region of

Characterization of Si nanorods by spect
✍ Hsu, Shih-Hsin ;Liu, En-Shao ;Chang, Yia-Chung ;Hilfiker, James N. ;Kim, Young D πŸ“‚ Article πŸ“… 2008 πŸ› John Wiley and Sons 🌐 English βš– 542 KB

## Abstract Spectroscopic ellipsometry (SE) is applied to characterize Si columnar nanostructures. By employing effective medium approximation (EMA) theory, Si nanorods are treated as a graded layer with each sub‐layer modeled as a mixture of Si and voids with varying porosity fraction. In addition

Spectroscopic ellipsometry measurements
✍ Tompkins, Harland G.; Tasic, Sonja; Baker, Jeff; Convey, Diana πŸ“‚ Article πŸ“… 2000 πŸ› John Wiley and Sons 🌐 English βš– 151 KB πŸ‘ 2 views

Optical methods are used to determine the thickness of thin metal films, with emphasis on spectroscopic ellipsometry and transmission. We discuss the conditions where this is possible and how to determine the optical constants for the material. The determination of the thickness of each of two metal