𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Spectroscopic ellipsometry in the infrared

✍ Scribed by A. Röseler


Publisher
Elsevier Science
Year
1981
Weight
392 KB
Volume
21
Category
Article
ISSN
0020-0891

No coin nor oath required. For personal study only.


📜 SIMILAR VOLUMES


Fourier-transform far-infrared spectrosc
✍ Michele Ortolani; Ulrich Schade 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 374 KB

The ellipsometry is an efficient method to determine the optical properties of matter. It has been largely employed with grating spectrometers in the visible, UV and near-infrared ranges for the characterization of thin films, surfaces and interfaces. In the mid-and far-infrared, where most substanc

Low-k dielectrics: a non-destructive cha
✍ P. Boher; C. Defranoux; M. Bucchia; C. Guillotin 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 773 KB

An infrared spectroscopic ellipsometer devoted to the characterization of silicon microelectronics has recently been developed at SOPRA. Its main feature is the ability to measure on a small spot (803200 mm) with a high signal / noise ratio. An original patented optical design suppresses back face r