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Characterization of Si nanorods by spectroscopic ellipsometry with efficient theoretical modeling

✍ Scribed by Hsu, Shih-Hsin ;Liu, En-Shao ;Chang, Yia-Chung ;Hilfiker, James N. ;Kim, Young Dong ;Kim, Tae Jung ;Lin, Chun-Jung ;Lin, Gong-Ru

Publisher
John Wiley and Sons
Year
2008
Tongue
English
Weight
542 KB
Volume
205
Category
Article
ISSN
0031-8965

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✦ Synopsis

Abstract

Spectroscopic ellipsometry (SE) is applied to characterize Si columnar nanostructures. By employing effective medium approximation (EMA) theory, Si nanorods are treated as a graded layer with each sub‐layer modeled as a mixture of Si and voids with varying porosity fraction. In addition, the rigorous coupled‐wave analysis and finite‐element Green's function method were used in modeling Si nanorods as a stack of disks with varying diameters and thicknesses, and the calculations are in satisfactory agreement with the measurement results. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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