Characterization of very thin Ge epilayers on (100) Si by spectroscopic ellipsometry

✍ Scribed by John E. Hulse; Stephen J. Rolfe

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 427 KB
• Volume: 223
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(93)90721-z