## Abstract Coβdoped TiO~2~ films were characterized by spectroscopic ellipsometry to determine their thickness, deposition rate and optical properties as function of substrate temperature and background gas composition. To fit the data we used a combination of a single TaucβLorentz oscillator with
β¦ LIBER β¦
Spectroscopic ellipsometry study of In2O3thin films
β Scribed by L. Miao; S. Tanemura; Y. G. Cao; G. Xu
- Publisher
- Springer US
- Year
- 2007
- Tongue
- English
- Weight
- 376 KB
- Volume
- 20
- Category
- Article
- ISSN
- 0957-4522
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