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Regrowth behaviour of Si1−xGex/Si structures formed by Ge+ ion implantation and post amorphisation

✍ Scribed by J.P. Zhang; R.J. Wilson; P.L.F. Hemment; A. Claverie; F. Cristiano; P. Salles; J.Q. Wen; J.H. Evans; A.R. Peaker; G.J. Parker


Book ID
113285768
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
770 KB
Volume
84
Category
Article
ISSN
0168-583X

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