Regrowth behaviour of Si1βxGex/Si struct
Regrowth behaviour of Si1βxGex/Si structures formed by Ge+ ion implantation and post amorphisation
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J.P. Zhang; R.J. Wilson; P.L.F. Hemment; A. Claverie; F. Cristiano; P. Salles; J
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Article
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1994
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Elsevier Science
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English
β 770 KB