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Regrowth kinetics of amorphous Ge layers created by 74Ge and 28Si implantation of Ge crystals

✍ Scribed by L. Csepregi; R.P. Küllen; J.W. Mayer; T.W. Sigmon


Publisher
Elsevier Science
Year
1977
Tongue
English
Weight
293 KB
Volume
21
Category
Article
ISSN
0038-1098

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