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Recombination activity of nickel in Czochralski silicon during rapid thermal process

✍ Scribed by Weiyan Wang; Zhenqiang Xi; Deren Yang; Duanlin Que

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 161 KB
Volume: 9
Category: Article
ISSN: 1369-8001
DOI: 10.1016/j.mssp.2006.01.057

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