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Effect of nitrogen doping on denuded zone formed by rapid thermal process in Czochralski silicon wafer

✍ Scribed by Can Cui; Deren Yang; Xiangyang Ma; Ruixin Fan; Liben Li; Duanlin Que

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 250 KB
Volume: 376-377
Category: Article
ISSN: 0921-4526
DOI: 10.1016/j.physb.2005.12.057

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