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Recombination activity of nickel in nitrogen-doped Czochralski silicon treated by rapid thermal processing

✍ Scribed by Weiyan Wang; Deren Yang; Xiangyang Ma; Yuheng Zeng; Duanlin Que

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 217 KB
Volume: 10
Category: Article
ISSN: 1369-8001
DOI: 10.1016/j.mssp.2008.01.002

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