Annealing kinetics during rapid thermal processing of excimer laser-induced defects in virgin silicon

✍ Scribed by B. Hartiti; A. Slaoui; J.C. Muller; P. Siffert

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 318 KB
• Volume: 46
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(90)90172-v