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Reactive Sputter Deposition of Highly Oriented AlN Films at Room Temperature

✍ Scribed by Iriarte, G. F.; Engelmark, F.; Katardjiev, I. V.

Book ID
125540937
Publisher
Cambridge University Press
Year
2002
Tongue
English
Weight
164 KB
Volume
17
Category
Article
ISSN
0884-2914

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