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Phase transformation of thin sputter-deposited tungsten films at room temperature

✍ Scribed by Rossnagel, S. M.; Noyan, I. C.; Cabral, C.

Book ID: 121819195
Publisher: AVS (American Vacuum Society)
Year: 2002
Tongue: English
Weight: 267 KB
Volume: 20
Category: Article
ISSN: 0734-211X
DOI: 10.1116/1.1506905

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