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Structural and Raman Scattering Properties of ZnO:Al Thin Films Sputter-Deposited at Room Temperature

✍ Scribed by Mohanty, Bhaskar Chandra; Kim, Byeong Kon; Yeon, Deuk Ho; Jo, Yeon Hwa; Choi, Ik Jin; Lee, Seung Min; Cho, Yong Soo

Book ID
121379708
Publisher
The Electrochemical Society
Year
2011
Tongue
English
Weight
351 KB
Volume
159
Category
Article
ISSN
0013-4651

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✍ GuillΓ©n, C. ;Herrero, J. πŸ“‚ Article πŸ“… 2009 πŸ› John Wiley and Sons 🌐 English βš– 493 KB

## Abstract Transparent and conductive Al‐doped ZnO (AZO) films with thickness between 0.2 and 1.1 ΞΌm were deposited by sputtering at room temperature on glass and polyethylene terephthalate (PET) substrates. All films were polycrystalline with average crystallite size increasing when the film thic