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Indium zinc oxide thin films deposited by sputtering at room temperature

✍ Scribed by Wantae Lim; Yu-Lin Wang; F. Ren; D.P. Norton; I.I. Kravchenko; J.M. Zavada; S.J. Pearton

Book ID
108060407
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
880 KB
Volume
254
Category
Article
ISSN
0169-4332

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Undoped ZnO, Al-doped ZnO (AZO) and Ga-doped ZnO (GZO) thin films were deposited on silica glass substrate at room temperature in a vacuum by KrF excimer laser (Ξ» = 248 nm) pulsed laser deposition method. The transparency of ZnO thin films showed the dependence on deposition area. The relationship b